# WARNING: Most commercial fabs will not be happy if you release their exact # process information! If you derive these numbers through SPICE models, # the process design kit, or any other confidential material, please round-off # the values and leave the process name unidentifiable by fab (i.e. call it # Bulk90LVT instead of TSMC90LVT) if you release parameters publicly. This # rule may not apply for open processes, but you may want to check. # All units are in SI, (volts, meters, kelvin, farads, ohms, amps, etc.) # This file contains the model for a Tri-Gate (Multi-Gate) 11nm LVT process Name = TG11LVT # Supply voltage used in the circuit and for characterizations (V) Vdd = 0.6 # Temperature (K) Temperature = 340 # ============================================================================= # Parameters for transistors # ============================================================================= # Contacted gate pitch (m) Gate->PitchContacted = 0.080e-6 # Min gate width (m) Gate->MinWidth = 0.080e-6 # Gate cap per unit width (F/m) Gate->CapPerWidth = 0.61e-9 # Source/Drain cap per unit width (F/m) Drain->CapPerWidth = 0.56e-9 # Parameters characterization temperature (K) Nmos->CharacterizedTemperature = 300.0 Pmos->CharacterizedTemperature = 300.0 #------------------------------------------------------------------------------ # I_Eff definition in Na, IEDM 2002 # I_EFF = (I(VG = 0.5, VD = 1.0) + I(VG = 1.0, VD = 0.5))/2 # R_EFF = VDD / I_EFF * 1 / (2 ln(2)) # This is generally more accurate for when the delay is input transition time # limited #------------------------------------------------------------------------------ # Effective resistance (Ohm-m) Nmos->EffResWidth = 1.16e-3 Pmos->EffResWidth = 1.28e-3 #------------------------------------------------------------------------------ # The ratio of extra effective resistance with each additional stacked # transistor # EffResStackRatio = (R_EFF_NAND2 - R_EFF_INV) / R_EFF_INV) # For example, inverter has an normalized effective drive resistance of 1.0. # A NAND2 (2-stack) will have an effective drive of 1.0 + 0.7, a NAND3 (3-stack) # will have an effective drive of 1.0 + 2 * 0.7. Use NORs for Pmos. This fit # works relatively well up to 4 stacks. This value will change depending on the # VDD used. #------------------------------------------------------------------------------ # Effective resistance stack ratio Nmos->EffResStackRatio = 0.89 Pmos->EffResStackRatio = 0.86 #------------------------------------------------------------------------------ # I_OFF defined as |I_DS| for |V_DS| = V_DD and |V_GS| = 0.0 # Minimum off current is used in technologies where I_OFF stops scaling # with transistor width below some threshold #------------------------------------------------------------------------------ # Off current per width (A/m) Nmos->OffCurrent = 100.0e-3 Pmos->OffCurrent = 100.0e-3 # Minimum off current (A) Nmos->MinOffCurrent = 40e-9 Pmos->MinOffCurrent = 4e-9 # Subthreshold swing (V/dec) Nmos->SubthresholdSwing = 0.080 Pmos->SubthresholdSwing = 0.080 # DIBL factor (V/V) Nmos->DIBL = 0.125 Pmos->DIBL = 0.125 # Subthreshold temperature swing (K/dec) Nmos->SubthresholdTempSwing = 100.0 Pmos->SubthresholdTempSwing = 100.0 #------------------------------------------------------------------------------ # ============================================================================= # Parameters for interconnect # ============================================================================= Wire->AvailableLayers = [Metal1,Local,Intermediate,Semiglobal,Global] # Metal 1 Wire (used for std cell routing only) # Min width (m) Wire->Metal1->MinWidth = 20e-9 # Min spacing (m) Wire->Metal1->MinSpacing = 20e-9 # Resistivity (Ohm-m) Wire->Metal1->Resistivity = 6.8e-8 # Metal thickness (m) Wire->Metal1->MetalThickness = 35.0e-9 # Dielectric thickness (m) Wire->Metal1->DielectricThickness = 35.0e-9 # Dielectric constant Wire->Metal1->DielectricConstant = 3.00 # Local wire, 1.0X of the M1 pitch # Min width (m) Wire->Local->MinWidth = 20e-9 # Min spacing (m) Wire->Local->MinSpacing = 20e-9 # Resistivity (Ohm-m) Wire->Local->Resistivity = 6.8e-8 # Metal thickness (m) Wire->Local->MetalThickness = 35.0e-9 # Dielectric thickness (m) Wire->Local->DielectricThickness = 35.0e-9 # Dielectric constant Wire->Local->DielectricConstant = 3.00 # Intermediate wire, 2.0X the M1 pitch # Min width (m) Wire->Intermediate->MinWidth = 40e-9 # Min spacing (m) Wire->Intermediate->MinSpacing = 40e-9 # Resistivity (Ohm-m) Wire->Intermediate->Resistivity = 4.50e-8 # Metal thickness (m) Wire->Intermediate->MetalThickness = 70.0e-9 # Dielectric thickness (m) Wire->Intermediate->DielectricThickness = 70.0e-9 # Dielectric constant Wire->Intermediate->DielectricConstant = 2.80 # Semiglobal wire, 4.0X the M1 pitch # Min width (m) Wire->Semiglobal->MinWidth = 80e-9 # Min spacing (m) Wire->Semiglobal->MinSpacing = 80e-9 # Resistivity (Ohm-m) Wire->Semiglobal->Resistivity = 2.80e-8 # Metal thickness (m) Wire->Semiglobal->MetalThickness = 150.0e-9 # Dielectric thickness (m) Wire->Semiglobal->DielectricThickness = 150.0e-9 # Dielectric constant Wire->Semiglobal->DielectricConstant = 2.60 # Global wire, 8.0X the M1 pitch # Min width (m) Wire->Global->MinWidth = 160e-9 # Min spacing (m) Wire->Global->MinSpacing = 160e-9 # Resistivity (Ohm-m) Wire->Global->Resistivity = 2.30e-8 # Metal thickness (m) Wire->Global->MetalThickness = 280e-9 # Dielectric thickness (m) Wire->Global->DielectricThickness = 250e-9 # Dielectric constant Wire->Global->DielectricConstant = 2.60 # ============================================================================= # Parameters for Standard Cells # ============================================================================= # The height of the standard cell is usually a multiple of the vertical # M1 pitch (tracks). By definition, an X1 size cell has transistors # that fit exactly in the given cell height without folding, or leaving # any wasted vertical area # Reasonable values for the number of M1 tracks that we have seen are 8-14 StdCell->Tracks = 11 # Height overhead due to supply rails, well spacing, etc. Note that this will grow # if the height of the standard cell decreases! StdCell->HeightOverheadFactor = 1.400 # Sets the available sizes of each standard cell. Keep in mind that # 1.0 is the biggest cell without any transistor folding StdCell->AvailableSizes = [1.0, 1.4, 2.0, 3.0, 4.0, 6.0, 8.0, 10.0, 12.0, 16.0]